▲ Nitrogen Pressure Reducing Valves for Semiconductor Factory

The Micro Pressure Type Direct Acting Pressure Reducing Valve is designed for ultra-low outlet pressures below 1 kgf/cm². In this project for a semiconductor facility in Taiwan, it was installed on nitrogen supply lines to provide precise pressure regulation for sensitive processes.

Project Overview

• Application: Nitrogen supply system in a semiconductor facility in Taiwan, requiring ultra-low and stable outlet pressure for critical processes.
• Products: 1" Stainless Steel 316 Micro Pressure Type Direct Acting Pressure Reducing Valve and 1” Stainless Steel Direct Acting Pressure Reducing Valve
• Requirement: Maintain ultra-low outlet pressure with high sensitivity and stability, ensuring precise control for nitrogen-dependent processes.

Key Features and Benefits of Z-Tide's RELT-SLP model

• Large diaphragm design ensures highly responsive and precise pressure regulation.
• Balanced piston design maintains consistent outlet pressure even with fluctuating inlet pressure.
• SS316 lower and upper bodies provide excellent corrosion resistance and long-term durability.
• Easy pressure calibration and maintenance, with available maintenance kits.

Project Outcome

The RELT-SLP model delivered stable, ultra-low outlet pressure for nitrogen systems, enabling precise process control, reliable operation, and long-term durability. This ensured optimal performance and safety in the semiconductor system.

Learn More About our  Z-Tide Micro Pressure Type Pressure Reducing Valve(Model RELT-SLP).